digplanet beta 1: Athena
Share digplanet:

Agriculture

Applied sciences

Arts

Belief

Business

Chronology

Culture

Education

Environment

Geography

Health

History

Humanities

Language

Law

Life

Mathematics

Nature

People

Politics

Science

Society

Technology

The planar process is a manufacturing process used in the semiconductor industry to build individual components of a transistor, and in turn, connect those transistors together. It is the primary process by which modern integrated circuits are built. The process was developed[1][2] by Jean Hoerni, one of the "traitorous eight", while working at Fairchild Semiconductor.

The key concept was to view a circuit in its two-dimensional projection (a plane), thus allowing the use of photographic processing concepts such as film negatives to mask the projection of light exposed chemicals. This allowed the use of a series of exposures on a substrate (Silicon) to create silicon oxide (insulators) or doped regions (conductors). Together with the use of metallization (to join together the integrated circuits), and the concept of p–n junction isolation (from Kurt Lehovec), the researchers at Fairchild were able to create circuits on a single silicon crystal slice (a wafer) from a monocrystalline silicon boule.

The process involves the basic procedures of silicon dioxide (SiO2) oxidation, SiO2 etching and heat diffusion. The final steps involves oxidizing the entire wafer with an SiO2 layer, etching contact vias to the transistors, and depositing a covering metal layer over the oxide, thus connecting the transistors without manually wiring them together.

Early versions of the planar process used a photolithography process using ordinary visible light. As of 2011, small features are typically made with 193 nm "deep" UV lithography.[3] Some researchers use even higher-energy extreme ultraviolet lithography

References[edit]

  1. ^ US 3025589  Hoerni, J. A.: "Method of Manufacturing Semiconductor Devices” filed May 1, 1959
  2. ^ US 3064167  Hoerni, J. A.: "Semiconductor device" filed May 15, 1960
  3. ^ Shannon Hill. "UV Lithography: Taking Extreme Measures". National Institute of Standards and Technology (NIST).

Other[edit]


Original courtesy of Wikipedia: http://en.wikipedia.org/wiki/Planar_process — Please support Wikipedia.
This page uses Creative Commons Licensed content from Wikipedia. A portion of the proceeds from advertising on Digplanet goes to supporting Wikipedia.
63677 videos foundNext > 

Understanding The FinFet Semiconductor Process

This video has been updated and the new version can be viewed at the link below. http://youtu.be/YYDNG4crRCs Threshold Systems provides consulting services t...

Planar Process Definition

planar process -n a method of producing diffused junctions in semiconductor devices. A pattern of holes is etched into an oxide layer formed on a silicon sub...

Planar Technology. D-Pak Features

Planar Technology. D-Pak Features. The planar technology combines a number of process operations to fabricate semiconductor devices with p-n junctions. P-n b...

Fairchild Briefing on Integrated Circuits

[Recorded: October, 1967] This half hour color promotional/educational film on the integrated circuit was produced and sponsored by Fairchild Semiconductor C...

The Legacy of Fairchild Semiconductor

[Recorded Oct 5, 2007] Founded in September 1957 in Palo Alto, California by eight young engineers and scientists from Shockley Semiconductor Laboratories, F...

Building the Future: The Planar Integrated Circuit

[Recorded: May 8, 2009] The solid circuits built originally by Jack Kilby established that all the components required to make general-purpose electronic cir...

Introduction to Planar Mapping (Projection) with Autodesk Maya

Level: Beginner This video demos the basics of UV mapping with planar projection technique, whereby it is a process about how to wrap a 2d texture image onto...

Planar Roughing from Solid Models with SmartCAM V17

An all new process for automated roughing toolpath generation directly from a solid model is introduced in SmartCAM V17. The new Planar Rough process generat...

JADA tutorial 2: Planar image processing - the planar region selection subGUI

This video demonstrates the use of JADA's planar region selection subGUI, which is the first of two subGUIs that are used to process planar image data.

Tutorial: Digital makeup with mocha Pro planar tracking

Adding digital makeup and improving skin wrinkes & blemishes can be a timely process. In this video tutorial, Imagineer Systems Product Manager, Martin Brenn...

63677 videos foundNext > 

We're sorry, but there's no news about "Planar process" right now.

Loading

Oops, we seem to be having trouble contacting Twitter

Talk About Planar process

You can talk about Planar process with people all over the world in our discussions.

Support Wikipedia

A portion of the proceeds from advertising on Digplanet goes to supporting Wikipedia. Please add your support for Wikipedia!